UaId_ProgramStateMachineType_Resume 2428 OpcUaId_ProgramStateMachineType_Halt [...] UaId_ProgramStateMachineType_FinalResultData 3850 OpcUaId_ProgramStateMachineType_Halted [...] UaId_ProgramStateMachineType_Suspended 2404 OpcUaId_ProgramStateMachineType_Halted