Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

during the given PERIODS (number [...] Output OUT REAL

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS

NumStages USINT (1..3) 3 Number [...] HeatIn REAL Heat control [...] CoolIn REAL Cool control

Parameter number: 1000 [...] number: 1010 AXIS [...] number: 1011 AXIS